Author Guidelines

Dear authors, please download the abstract guidelines and use the link for online abstract submission.

Please prepare an extended abstract (up to two pages: one page of text, roughly 500 words, optionally one page of graphical illustrations), clearly describing the purpose, the chosen approach, and the achieved results of your work, and suggest one or more fitting topic(s) for your contribution from the list below:

1. Equipment and Process Fault Detection, Classification and Prediction
2. Data Management and Process Control
3. Metrology and Analytics
4. Fab-wide APC, Yield and “Multi-fab” Approaches, e-Diagnostics and e-Manufacturing
5. Standards and Roadmaps
6. Academia Contributions, Future Needs and Opportunities

There will be oral presentations and a poster session - please indicate your preference. The program committee will finally select well-balanced oral sessions.

Your abstract will be evaluated against the following criteria:

• Clarity (solved problem, approach, results)
• Usefulness for AEC/APC
• Significance/importance for AEC/APC
• Innovation/original work
• No advertisement is allowed! Suppliers’ presentations should show concrete applications at customers’ site or concrete cases of problem solving; joint presentations with customers will be appreciated.

To ensure clarity, you are asked to follow the structure given in the abstract guidelines.

Deadline for abstract submission is January 08, 2010. Please use the online abstract submission. It will be available soon.
Presenters will be notified by February 05, 2010.
Final presentations have to be submitted in electronic format until March 29, 2010.

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Contact Gitta Haupold haupold(at)aecapc-europe.com